Andrew C. Kummel

1989 Fellow

Current Institution: University of California, San Diego

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About Andrew C. Kummel's Work

My group is focused on understanding and imaging chemical processing at the atomic level for multiple semiconductor processes including deposition of gate oxides, selective ALD of silicides/oxides/metals, selective cleaning of surfaces, DFT of ferroelectric HfO2. My hobbies include coordinating the backend research activities of the ASCENT-JUMP-SRC center, research on silica for cancer drug delivery, and long distance running.